ACLS, Axcelis Technologies, Inc. ** ACLS and Lam Research Corp. reported a strategic collaboration agreement focusing on the interrelationship between ion implantation, etch processes, and photoresist strip applications, including material modification implants and high-dose implant strip (HDIS).Separately, ACLS decided that it will exit the dry-strip business and divest its dry-strip intellectual property and technology, including the advanced non-oxidizing process technology of its Integra product line, to Lam Research, allowing ACLS to focus exclusively on the ion implant market.ACLS will continue to ship its 300 mm dry-strip products through August 2013, and support the large ACLS installed base indefinitely, including all existing parts and service contracts.For Lam, in addition to acquiring all of ACLS ' dry-strip IP, the collaboration agreement provides for cooperation with ACLS in the area of advanced implant technology focused on further strengthening its industry-leading etch, dry-strip, clean, and deposition offerings.
ACLS provides innovative, high-productivity solutions for the semiconductor industry.More about ACLS at
www.axcelis.com .********
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